Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5627640 | Method for measuring radical species distribution in plasma and an apparatus therefor | Hong-Young Chang, Pyung-Woo Lee | 1997-05-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5627640 | Method for measuring radical species distribution in plasma and an apparatus therefor | Hong-Young Chang, Pyung-Woo Lee | 1997-05-06 |