Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5652187 | Method for fabricating doped interlayer-dielectric film of semiconductor device using a plasma treatment | Changgyu Kim, Changki Hong, Yongchul Ahn | 1997-07-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5652187 | Method for fabricating doped interlayer-dielectric film of semiconductor device using a plasma treatment | Changgyu Kim, Changki Hong, Yongchul Ahn | 1997-07-29 |