Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5654205 | Apparatus and method for depositing particles onto a wafer | Seung-Ki Chae, Byung-Seol Ahn, Jong Soo Kim | 1997-08-05 |
SH
Sang-kyu Hahm
Overall (1997): #81,423 of 185,788Top 45%
1
Patents 1997