Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5635644 | Apparatus for measuring a layer thickness using transverse waves of ultrasonic waves | Hitoshi Utsumi | 1997-06-03 |
| 5630878 | Liquid material-vaporizing and supplying apparatus | Hideaki Miyamoto, Takeshi Kawano | 1997-05-20 |