Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5683546 | Method of etching silicon substrate at different etching rates for different planes of the silicon to form an air bridge | — | 1997-11-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5683546 | Method of etching silicon substrate at different etching rates for different planes of the silicon to form an air bridge | — | 1997-11-04 |