Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5696008 | Semiconductor device and method of manufacturing the same | Tatsuo Sugiyama, Hiroaki Nakaoka | 1997-12-09 |
| 5670810 | Semiconductor device with a vertical field effect transistor | Tatsuo Sugiyama, Hiroaki Nakaoka | 1997-09-23 |
| 5593539 | Plasma source for etching | Masafumi Kubota, Noboru Nomura | 1997-01-14 |