MS

Michio Sakurai

NE Nec: 2 patents #67 of 1,182Top 6%
Overall (1997): #29,406 of 185,788Top 20%
2
Patents 1997

Issued Patents 1997

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
5700348 Method of polishing semiconductor substrate — 1997-12-23
5690544 Wafer polishing apparatus having physical cleaning means to remove particles from polishing pad — 1997-11-25