Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5595603 | Apparatus for the controlled delivery of vaporized chemical precursor to an LPCVD reactor | Keith A. Klinedinst | 1997-01-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5595603 | Apparatus for the controlled delivery of vaporized chemical precursor to an LPCVD reactor | Keith A. Klinedinst | 1997-01-21 |