Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5618388 | Geometries and configurations for magnetron sputtering apparatus | Thomas H. Allen, Eric R. Dickey, Bryant P. Hichwa, Rolf F. Illsley, Robert F. Klinger +7 more | 1997-04-08 |