Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5592004 | Silicon nitride film having a short absorption wavelength and surrounding crystal-like grain boundaries | Muneo Tamura, Takeshi Yamauchi, Takeshi Fukazawa, Akira Kuroyanagi, Tooru Yamaoka | 1997-01-07 |