Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5682226 | Photomask, an exposure method and a projection exposure apparatus | Masaya Komatsu | 1997-10-28 |
| 5592259 | Photomask, an exposure method and a projection exposure apparatus | Masaya Komatsu | 1997-01-07 |