YO

Yasuhiro Oomura

NI Nikon: 2 patents #116 of 390Top 30%
📍 Yatomi, JP: #1 of 7 inventorsTop 15%
Overall (1997): #19,441 of 185,788Top 15%
2
Patents 1997

Issued Patents 1997

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
5668672 Catadioptric system and exposure apparatus having the same 1997-09-16
5638218 Catadioptric projection apparatus 1997-06-10