Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5694241 | Catadioptric reduction projection optical system and exposure apparatus employing the same | Yutaka Suenaga | 1997-12-02 |
| 5668673 | Catadioptric reduction projection optical system | Yutaka Suenaga, Yoshiyuki Shimizu, Kiyoshi Hayashi | 1997-09-16 |
| 5592329 | Catadioptric optical system | Yutaka Suenaga | 1997-01-07 |