Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5685895 | Air cleaning apparatus used for an exposure apparatus | Shigeru Hagiwara | 1997-11-11 |
| 5608456 | Image sensor used with substantially monochromatic illuminating light of high coherence for preventing or reducing interference fringes | — | 1997-03-04 |