Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5684569 | Position detecting apparatus and projection exposure apparatus | Ayako Sugaya | 1997-11-04 |
| 5680200 | Inspection apparatus and method for optical system, exposure apparatus provided with the inspection apparatus, and alignment apparatus and optical system thereof applicable to the exposure apparatus | Ayako Sugaya, Tadashi Nagayama | 1997-10-21 |