Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5651827 | Single-wafer heat-treatment apparatus and method of manufacturing reactor vessel used for same | Hiroyuki Miyazawa | 1997-07-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5651827 | Single-wafer heat-treatment apparatus and method of manufacturing reactor vessel used for same | Hiroyuki Miyazawa | 1997-07-29 |