Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5686211 | Method and apparatus for removing a thin film layer | Yukako Komaru | 1997-11-11 |
| 5656229 | Method for removing a thin film layer | Akikazu Tanimoto, Yukako Komaru | 1997-08-12 |
| 5597590 | Apparatus for removing a thin film layer | Akikazu Tanimoto, Yukako Komaru | 1997-01-28 |