TY

Tadao Yasuzato

NE Nec: 3 patents #27 of 1,182Top 3%
Overall (1997): #10,503 of 185,788Top 6%
3
Patents 1997

Issued Patents 1997

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
5644390 Intensity distribution simulating method — 1997-07-01
5636005 Optical projection aligner equipped with rotatable fly-eye lens unit — 1997-06-03
5619304 Reduction exposure apparatus with improved resolution characteristic and raised light intensity — 1997-04-08