Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5593761 | Electron beam shaping mask for an electron beam system with pattern writing capability | Hiroshi Yamashita | 1997-01-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5593761 | Electron beam shaping mask for an electron beam system with pattern writing capability | Hiroshi Yamashita | 1997-01-14 |