Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5677109 | Method for E-beam writing | Junko Morikawa, Hiroshi Yamashita | 1997-10-14 |
| 5677756 | Apparatus for exposing a semiconductor wafer to light including an illumination optical system comprising a glass substrate having light-permeable patterns | — | 1997-10-14 |
| 5627987 | Memory management and protection system for virtual memory in computer system | Mitsuo Saito, Kenichi Maeda, Shigehiro Asano, Toshio Okamoto, Shin Sungho +1 more | 1997-05-06 |
| 5607801 | Direct patterning method of resist film using electron beam | — | 1997-03-04 |