Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5663087 | Method for forming silicon nitride film having low leakage current and high break down voltage | — | 1997-09-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5663087 | Method for forming silicon nitride film having low leakage current and high break down voltage | — | 1997-09-02 |