Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5629221 | Process for suppressing boron penetration in BF.sub.2 .sup.+ -implanted P.sup.+ -poly-Si gate using inductively-coupled nitrogen plasma | Chih-Hsun Chu | 1997-05-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5629221 | Process for suppressing boron penetration in BF.sub.2 .sup.+ -implanted P.sup.+ -poly-Si gate using inductively-coupled nitrogen plasma | Chih-Hsun Chu | 1997-05-13 |