Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5677757 | Projection exposure apparatus | Naomasa Shiraishi | 1997-10-14 |
| 5661546 | Projection exposure apparatus and method with changing imaging characteristics and illumination conditions | — | 1997-08-26 |
| 5650840 | Focus detecting method and apparatus | — | 1997-07-22 |