Mark Lucas

MT Mrs Technology: 1 patents #1 of 3Top 35%

📍 Groton, MA: #5 of 15 inventorsTop 35%

🗺 Massachusetts: #1,083 of 4,501 inventorsTop 25%

Overall (1997): #108,985 of 185,788Top 60%

Patents 1997

Issued Patents 1997

Showing 1–1 of 1 patents

Patent #	Title	Co-Inventors	Date
5677758	Lithography System using dual substrate stages	Robert A. McEachern, Craig R. Simpson	1997-10-14