Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5670016 | Method for cleaning substrate prior to tungsten deposition | Mao-Chieh Chen, Wen-Kuan Yeh, Lu Liu | 1997-09-23 |
| 5629237 | Taper etching without re-entrance profile | Kuei-Lung Chou, Jiunn-Jyi Lin, Hsien-Wen Chang | 1997-05-13 |