Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5683518 | Rapid thermal processing apparatus for processing semiconductor wafers | Katsuhito Nishikawa | 1997-11-04 |
| 5601107 | Automated process gas supply system for evacuating a process line | Richard S. Pairish | 1997-02-11 |