Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5677236 | Process for forming a thin microcrystalline silicon semiconductor film | Kimihiko Saitoh, Nobuyuki Ishiguro, Shin Fukuda, Yoshinori Ashida, Nobuhiro Fukuda | 1997-10-14 |