SK

Shigeo Kumabe

MM Mitsubishi Materials: 1 patents #16 of 93Top 20%
Overall (1997): #78,449 of 185,788Top 45%
1
Patents 1997

Issued Patents 1997

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5618227 Apparatus for polishing wafer Yukio Tsutsumi, Keisuke Takahashi 1997-04-08