SN

Shuji Nakao

Mitsubishi Electric: 2 patents #164 of 1,581Top 15%
📍 Itami, JP: #25 of 229 inventorsTop 15%
Overall (1997): #24,221 of 185,788Top 15%
2
Patents 1997

Issued Patents 1997

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
5698348 Phase shifting mask, manufacturing method thereof, and exposure method using such a phase shifting mask — 1997-12-16
5597667 Photomask and photomask blank — 1997-01-28