Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5687085 | Substrate processing apparatus and method | Toru Morimoto, Kenji Hashinoki, Tetsuya Hamada | 1997-11-11 |
| 5668691 | Arrangement for gas circuit breaker with reactor and capacitor connected in series and method for setting its circuit parameter | Hiroki Ito, Takashi Moriyama, Suenobu Hamano, Etsuo Nitta, Naoaki Takeji +2 more | 1997-09-16 |
| 5668733 | Substrate processing apparatus and method | Toru Morimoto, Kenji Hashinoki, Tetsuya Hamada | 1997-09-16 |