Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5677090 | Method of making X-ray mask having reduced stress | Kenji Marumoto, Sunao Aya, Koji Kise, Kei Sasaki | 1997-10-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5677090 | Method of making X-ray mask having reduced stress | Kenji Marumoto, Sunao Aya, Koji Kise, Kei Sasaki | 1997-10-14 |