Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5685951 | Methods and etchants for etching oxides of silicon with low selectivity in a vapor phase system | Kevin J. Torek, Whonchee Lee | 1997-11-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5685951 | Methods and etchants for etching oxides of silicon with low selectivity in a vapor phase system | Kevin J. Torek, Whonchee Lee | 1997-11-11 |