Issued Patents 1997
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5665644 | Semiconductor processing method of forming electrically conductive interconnect lines and integrated circuitry | Gurtej S. Sandhu | 1997-09-09 |
| 5643048 | Endpoint regulator and method for regulating a change in wafer thickness in chemical-mechanical planarization of semiconductor wafers | — | 1997-07-01 |
| 5631174 | Method for forming a spacer with a prograde profile | — | 1997-05-20 |
| 5629246 | Method for forming fluorine-doped glass having low concentrations of free fluorine | — | 1997-05-13 |
| 5624868 | Techniques for improving adhesion of silicon dioxide to titanium | — | 1997-04-29 |