Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5679065 | Wafer carrier having carrier ring adapted for uniform chemical-mechanical planarization of semiconductor wafers | — | 1997-10-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5679065 | Wafer carrier having carrier ring adapted for uniform chemical-mechanical planarization of semiconductor wafers | — | 1997-10-21 |