Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5693377 | Method of reducing carbon incorporation into films produced by chemical vapor deposition involving titanium organometallic and metal-organic precursor compounds | Brenda D. Wanner, David R. Atwell | 1997-12-02 |
| 5674574 | Vapor delivery system for solid precursors and method regarding same | David R. Atwell | 1997-10-07 |