Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5695896 | Process for fabricating a phase shifting mask | — | 1997-12-09 |
| 5686208 | Process for generating a phase level of an alternating aperture phase shifting mask | Chin Le | 1997-11-11 |
| 5633103 | Self-aligned alignment marks for phase-shifting masks | John J. DeMarco | 1997-05-27 |