Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5623853 | Precision motion stage with single guide beam and follower stage | W. Thomas Novak, Uday Nayak, Akimitsu Ebihara | 1997-04-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5623853 | Precision motion stage with single guide beam and follower stage | W. Thomas Novak, Uday Nayak, Akimitsu Ebihara | 1997-04-29 |