Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5614742 | Micromechanical accelerometer with plate-like semiconductor wafers | Thomas Gessner, Martin Hafen, Eberhard Handrich, Peter Leinfelder, Egbert Vetter +1 more | 1997-03-25 |