Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5658695 | Method for fabricating phase shift mask comprising the use of a second photoshield layer as a sidewall | — | 1997-08-19 |
| 5650347 | Method of manufacturing a lightly doped drain MOS transistor | — | 1997-07-22 |
| 5591550 | Phase shift mask and method for forming phase shift mask | Young Jin SONG | 1997-01-07 |