Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5597745 | Method for forming TiN film and TiN film/thin TiSi.sub.2 film, and method for fabricating semiconductor element utilizing the same | Hak No Kim | 1997-01-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5597745 | Method for forming TiN film and TiN film/thin TiSi.sub.2 film, and method for fabricating semiconductor element utilizing the same | Hak No Kim | 1997-01-28 |