Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5626716 | Plasma etching of semiconductors | William Frederick Bosch, Helen Zhu | 1997-05-06 |
| 5611888 | Plasma etching of semiconductors | William Frederick Bosch, Helen Zhu | 1997-03-18 |