Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5702533 | Particulate free vacuum compatible pinch seal | Kenneth R. Krieg | 1997-12-30 |
| 5654796 | Apparatus and method for mapping plasma characteristics | — | 1997-08-05 |
| 5644400 | Method and apparatus for determining the center and orientation of a wafer-like object | — | 1997-07-01 |