Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5688360 | Method and apparatus for polishing a semiconductor substrate wafer | — | 1997-11-18 |
| 5665656 | Method and apparatus for polishing a semiconductor substrate wafer | — | 1997-09-09 |
| 5614444 | Method of using additives with silica-based slurries to enhance selectivity in metal CMP | János Farkas, Matt Stell, Sing-Mo Tzeng | 1997-03-25 |