Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5658425 | Method of etching contact openings with reduced removal rate of underlying electrically conductive titanium silicide layer | Paul Rhoades, David Kerr | 1997-08-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5658425 | Method of etching contact openings with reduced removal rate of underlying electrically conductive titanium silicide layer | Paul Rhoades, David Kerr | 1997-08-19 |