Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5656122 | Shadow clamp | Henry Brumbach | 1997-08-12 |
| 5609720 | Thermal control of semiconductor wafer during reactive ion etching | Keith Dawson | 1997-03-11 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5656122 | Shadow clamp | Henry Brumbach | 1997-08-12 |
| 5609720 | Thermal control of semiconductor wafer during reactive ion etching | Keith Dawson | 1997-03-11 |