Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5683539 | Inductively coupled RF plasma reactor with floating coil antenna for reduced capacitive coupling | Xue-Yu Qian | 1997-11-04 |
| 5667701 | Method of measuring the amount of capacitive coupling of RF power in an inductively coupled plasma | Xue-Yu Qian | 1997-09-16 |