Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5676762 | Process for distributing ultra high purity gases with minimized corrosion | Masao Kimura, Toshiyuki Tsukamoto, Kohei Tarutani | 1997-10-14 |
| 5677480 | Method and system for assessing the operating condition of a pressure regulator in a corrosive gas distribution system | A. Nimal Liyanage, Eiichi Ozawa, Kazuo Yokogi | 1997-10-14 |
| 5673562 | Bulk delivery of ultra-high purity gases at high flow rates | — | 1997-10-07 |
| 5591273 | Process for distributing ultra high purity gases with minimized contamination and particulates | Toshiyuki Tsukamoto, Norbert Fanjat | 1997-01-07 |