Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5668524 | Ceramic resistor and electrostatic chuck having an aluminum nitride crystal phase | Hiroshi Aida, Kazuhiko Mikami | 1997-09-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5668524 | Ceramic resistor and electrostatic chuck having an aluminum nitride crystal phase | Hiroshi Aida, Kazuhiko Mikami | 1997-09-16 |