Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5674763 | Method of manufacturing a semiconductor device | Masaru Koyanagi | 1997-10-07 |
| 5666002 | Semiconductor device with wiring layer in tunnel in semiconductor substrate | Tadashi Yamamoto | 1997-09-09 |