Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5689112 | Apparatus for detection of surface contaminations on silicon wafers | Harald A. Enge | 1997-11-18 |
| 5622608 | Process of making oxidation resistant high conductivity copper layers | Peijun Ding | 1997-04-22 |